UTA ARRI Lecture Series in MEMS




Wednesday, March 6, 2002 - 8:45 AM – 5:00 PM


Automation & Robotics Research Institute – UTA Fort Worth Campus

7300 Jack Newell Blvd, Fort Worth TX 76118

A seminar presented jointly by MEMScAP, Inc., and the Automation & Robotics Research Institute

Micro-Eectro-Mechanical Systems (MEMS) represent the merger of integrated circuits and optics at a scale of 1 to 100 microns. They are the next step in the silicon revolution that began 40 years ago and has changed every aspect of our lives. MEMS is a well-positioned enabling technology for fast growing markets such as biomedical applications and optical and wireless communications. By bringing together semiconductor-based electronics and micro-machining technology, MEMS-based components can provide:

·         smaller form factors for tighter integration

·         higher performance with reduced power consumption

·         quality that meets rigorous telecommunications and sensor standards


MEMScAP designs and manufactures MEMS-based products for a range of industries. Its line of commercial design automation tools for MEMS include the popular MEMS Pro™ and MEMS Xplorer™ tool suites, offering flexible solutions for integrated MEMS and electronics.


ARRI’s Advanced Controls, Sensors and MEMS group (ACSM), headed by Moncrief-O’Donnell Professor Frank Lewis, is one of UTA’s premier centers of MEMS and robotic control research.













Seminar Topics


MEMS overview

CAD design challenges for MEMS

Achieving system-level design

Behavioral modeling

Optimization and statistical analysis

Design rule checking

Parasitic extraction





3D modeling

3D visualization

Finite Element Modeling

Behavioral reduced-order models

Material properties Process support

Packaging issues


There is no cost for seminar; lunch will be provided by MEMScAP. ARRI is located at the UTA Fort Worth Riverbend Campus, North of the intersection between Loop 820 East and I-30 (directions available from http://arri.uta.edu/misc/map.htm). Following the morning presentation, a hands-on introduction will be available; due to the limited seating available, you must REGISTER BEFORE FEBRUARY 25th by filling out and faxing the bottom of this form, or contact

·        Raul Fernandez, ARRI Program Manager (fernandez@uta.edu  — 817.272.5973)

·        Mary Ann Maher, MEMScAP (maher@memscap.com  — 510.444.5269)


By FAX: 817.272.5952 or E-mail: fernandez@uta.edu