UTA ARRI Lecture Series in MEMS


An Overview of MEMS Technology


Wednesday, April 3, 2002 - 2:00 PM 4:00 PM


Automation & Robotics Research Institute UTA Fort Worth Campus

7300 Jack Newell Blvd, Fort Worth TX 76118


Presented by Dr. James J. Allen

Microsystems Science, Technology and Components

Sandia National Laboratories



This talk will provide an overview of a range of MEMS technologies. The fabrication technologies that have developed and their capabilities will be discussed. The applications of these technologies and examples will be presented.


Future MEMS devices will involve the integration of the functions of think, sense, act, communicate, and self power. Progress in all of these areas of MEMS technologies has been made, but there is more to do. The talk will show examples of micro-actuators, sensors and devices that will fit into this framework. MEMS technologies are also attracting interest from the commercial sector for various applications, such as optical switching, RF switches, and bio-medical applications.


This presentation will also provide an overview of Sandia National Laboratories involvement in MEMS technology. An overview of the MEMS fabrication technologies under development at Sandia will be discussed, such as the bulk silicon etching processes and SUMMiTTM (Sandia Ultra-Planar Multi-Level MEMS Technology).


The development of MEMS design tools applicable for use with the SUMMiT fabrication process will be discussed. These tools include design rule checking, 2-D and 3-D visualization tools.


Dr. Allen earned his Ph.D. in Mechanical Engineering from Purdue University in 1981. He has worked for Sandia National Laboratories since 1985 with assignments in the Engineering Analysis, Experimental Structural Dynamics, and Smart Structures and Materials Groups.













Pinion gear with grains of pollen and red blood cells to illustrate size.

Rotary indexing device.


ARRI is located at the UTA/Fort Worth Campus, North of the intersection between Loop 820 East and I-30 (directions available from http://arri.uta.edu/misc/map.htm). Please contact Raul Fernandez at 817.272.5973 for additional information.